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As sensor digitization for IoT-applications, this paper presents an all-digital MEMS gyro-sensor circuit method, using TAD (Time-A/D converter)-based digital synchronous detection (TAD-DSD) by applying entirely all-digital time-domain processing, which uses no conventional methods such as analogmixers, -filters and -ADCs. The proposed method involves twostep processing: 1) voltage-signal levels of...
For achieving an all-digital resonant MEMS gyroscope, this paper presents an all-digital MEMS tuning-fork self-excited vibration control method, using TAD (Time-A/D converter)-based all-digital PLL (TAD-ADPLL) by applying a unique control algorithm based on entirely time-domain processing, which uses no conventional analog method such as automatic gain control (AGC) or automatic level control (ALC)...
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