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In this paper, the design of a data driven controller using a small-gain theorem approach for improving the positioning accuracy of a piezoelectric tube scanner (PTS) is demonstrated. Open-loop frequency responses of both the X-PTS and Y-PTS are measured using a band-limited sweep sine signal and are used as primary data for this control design. The frequency response of the controllers is synthesized...
The design of a controller which compensates for the effects of creep, hysteresis, vibration, and cross-coupling in a piezoelectric tube scanner (PTS) is presented in this paper. The PTS is a key nanopositioning component installed in a commercial atomic force microscope (AFM) to perform scanning. The impediments to fast scanning due to PTS dynamics are: 1) the presence of mechanical resonances; 2)...
In this paper we describe the cross-coupling effect between X-Y axes of piezoelectric tube (PZT) scanner used in an atomic force microscope (AFM). During raster scanning X-Y axes induced cross-coupling effect in the lateral positioning of the scanner stage of the AFM and as a result, it produces blurred or distorted images. To address this effect, an LQG controller is designed and implemented on AFM...
This paper presents the design of an LQG controller for the lateral positioning of a piezoelectric tube actuator (PZT) used in an atomic force microscope (AFM). In the proposed control scheme, an internal model of the reference signal is included in the plant model and an integrator with the system error is introduced. As a result, it reduces the steady-state tracking error. A vibration compensator...
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