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High sensitivity, on-chip calorimeter platform using V2O5 thin film thermistor was developed. Integration of a V2O5 thermistor with a high temperature sensitivity of −2.2%/K with a vacuum insulated, suspended SiN membrane structure enabled a low thermal conductance of 12μW/K and a direct detection of 10nW of heat with an estimated detection limit of 570pW. We also investigated the feasibility of integrating...
Large-area array of 120 nm diameter plasmonic air-gap disk resonators with 30-nm thick air-gap is fabricated using nanoimprinting. An inside-out structure allows full access to the slot mode, and easy excitation of the plasmon mode.
We have investigated a silicon nitride waveguide with a horizontal air slot which is integrated with SU8 fluidic channel. Formation of air slot is performed in SU8 channel by selective wet etching between SiNx and SiO2.
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