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We utilize a combination of DC-IV measurements as well as two very sensitive electrically detected magnetic resonance measurements, spin-dependent recombination and spin dependent tunneling, to identify the atomic-scale defects involved in the negative bias temperature instability (NBTI) in 2.3 nm plasma- nitrided SiO2-based pMOSFETs. Our measurements indicate that the NBTI-induced defect in the plasma-nitrided...
This paper examines the atomic-scale defects involved in a metal-oxide-silicon field-effect-transistor reliability problem called the negative-bias temperature instability (NBTI). NBTI has become the most important reliability problem in modern complementary-metal-oxide-silicon technology. Despite 40 years of research, the defects involved in this instability were undetermined prior to this paper...
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