The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
Potential candidate methods for closed loop control using OES have been evaluated for SF 6 etching of Si and for fluorocarbon etching of SiO 2 . In the case of SF 6 etching of Si it was found that a spectrum matching method could be used to recover the plasma state from a deliberate change in all process parameters, or even a doubling of the silicon load present in the chamber...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.