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A unique three-axis ultraprecision CNC machine tool is proposed, where two innovative technologies invented by the authors are employed. The first technology is an Angstrom positioning system using the Twist-roller Friction Drive (TFD), and the second technology is an active aerostatic guideway incorporating the Active Inherent Restrictor (AIR). This active aerostatic guideway was invented to improve...
We propose a positioning system with an angstrom resolution. The positioning system has a table guided by a hydrostatic guideway, and a twist-roller friction drive is incorporated into the table. The friction drive converts the rotation of an AC servo driving motor into the linear motion of the table. The twist-roller friction drive is advantageous for ultraprecision positioning, because its lead...
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