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This paper presents a low power read-out front-end for 3-axis MEMS capacitive accelerometer. The front-end includes the analog preamplifier (to sense the signal coming from the MEMS) and a Successive-Approximation 10b A/D Converter, for digitalization and off-chip digital-signal-processing. Power minimization is achieved by using a continuous-time sensing preamplifier (i.e. constant-charge capacitance-to-voltage...
A low-power front-end for a capacitive MEMS accelerometer sensor is presented. The read-out front-end includes the analog preamplifier (to sense the signal coming from the MEMS) and a Successive-Approximation A/D Converter. The off-chip MEMS is a capacitive accelerometer. Constant-charge Capacitance-to-Voltage conversion has been used with a programmable-gain (to accommodate different MEMS sensor...
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