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In this paper, we fabricated an anisotropically etched multilevel silicon diffractive lens. The operating frequency and focal length of the lens are 2.52 THz and 15 mm, respectively. Both 4- and 16-level lenses have been realized. The total etch depth and size of the lenses are 49 and 45 mm 45 mm. Positive tone thick resist AZ 4562 was used as a mask material for dry etching the...
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