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Z-cut LiNbO 3 crystals were implanted at room temperature with 3.0MeV O ions with a fluence of 6×10 14 ions/cm 2 . The effective refractive index of the guided mode was obtained by the prism coupling technique combined with mechanical stripping (ion beam etching) at room temperature. Surface layers, with thicknesses of 300, 630, 880, 1100, and 1500nm, were removed. The channel...
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