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Meaningful progress in the fields of MEMS is associated with the continuous development of the micromachining technologies. One of the most promising devices in MEMS is thermal sensors. When the first microbolometer appeared on the market, a huge interest in thermal detectors was observed. This paper is a short overview study on microbolometer geometry, different solutions and possibilities to implement...
The article presents the results of the application of golden section search for selection of the MEMS electro-actuator comb length to receive the desired displacement at given voltage heating. The proposed solutions have been implemented programmatically using the ANSYS system.
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