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A bulk sample of semi-insulating CdTe:In was exposed to single pulses of 21.2-nm radiation of Ne-like zinc plasma-based laser and 46.9-nm radiation of Ne-like argon capillary discharge laser. Irreversible changes induced by pure XUV laser radiation are studied and compared with action of continuous 532-nm high-power laser and IR pulses at 1320 nm. Modified surface is analyzed by optical and atomic...
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