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In this research, Cr(N)/C(DLC) multilayered coatings were deposited on M2 steel substrates by an unbalanced magnetron sputtering technique. By varying the substrate rotation speed, four multilayered coatings with different bilayer thickness were produced. The bilayer thickness and structure of multilayered coatings were characterized by low-angle XRD, XPS depth profile, and cross-section TEM observation...
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