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Different mixed alkoxide β-ketoester Ti precursors were synthesized and titanium bis (isopropoxide) bis (tert-butylacetoacetate) was selected for detailed CVD studies of TiO 2 and SrTiO 3 films. Films were deposited on Pt/ZrO 2 /SiO 2 /Si substrates and special emphasis was directed on low deposition temperatures (≤500 °C). TiO 2 films were amorphous for deposition...
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