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A high-performance MEMS-based gas chromatography (GC) device is proposed comprising a miniature serpentine column with dimensions of 3.2 m × 200 μm × 250 μm (length × width × depth) and an integrated Pt micro-heater. The column is fabricated on a Si die measuring 3.5 × 1.8 mm2 using a wet etching process and is bonded to a Pyrex cover plate incorporating the Pt micro-heater via a thermal fusion process...
The purpose of this paper is to apply characteristics of residual stress that causes cantilever beams to bend for manufacturing a micro-structured gas flow sensor. This study uses a silicon wafer deposited silicon nitride layers, reassembled the gas flow sensor with four cantilever beams that perpendicular to each other and manufactured piezoresistive structure on each micro-cantilever by MEMS technologies,...
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