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In this work a compact microprobe for advanced chip-inspection applications is introduced. The probe features integrated photoconductive switches for Terahertz pulse generation and detection. Device application is demonstrated for contact-free high-resolution time-domain reflectometry measurements at silicon-chip test structures.
Single element coplanar strip-line photoconductive (PC) emitters remain to date the most common means of generating an detecting sub-picosecond terahertz radiation. These antennas however, suffer from excitation power limitations leading to relatively early saturation. It is possible to overcome such limitations by using several radiating elements arranged as an array. We present an array structure...
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