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This study based on piezo-electric sensing principle to develop a high S/N ratio MEMS microphone. The patterned PZT and electrodes designed implemented above the clamped diaphragm to generate high stress concentration on PZT and Si bimorph diaphragm. The proposed central-circle electrode design can induce more charge than the edge-surrounded electrode design (served as the reference design). The proposed...
This work proposes single crystal X-cut thin film Lithium Niobate (LN) resonators operating in a shear horizontal (SH0) acoustic plate wave mode to achieve a high electromechanical coupling coefficient. In the fabrication process, we take advantage of the off-the-shelf single crystal X-cut LN dies on which surface micromachining technology is used to fabricate the devices. We design two fabrication...
This study presents a novel single proof-mass tri-axis capacitive CMOS MEMS accelerometer to reduce the footprint of chip. A serpentine out-of-plane (Z-axis) spring is designed to reduce cross-axis error. A magnetic actuation for Z-axis self-test is also presented. The tri-axis accelerometer has been successfully implemented using TSMC 2P4M process and our in-house post-process. Measurement results...
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