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In this paper, a new LIGA related process chain, named MSG process [German acronym for multicomponent injection molding (MS) and electroplating (G)] is presented as a promising production cycle for the replication of micro-testing samples. Structures manufactured by the LIGA process but also e.g. micro-milled structures can be reproduced. The focus of this work was two fold: First, the accuracy of...
A two-step replication process is described, allowing the non-destructive reproduction of micro-patterned tools. The first step comprises the embedding of the original part into silicone resin, the resin curing, and the separation of the part from the silicone rubber. The outstanding plasticity and the weak adherence of silicone rubber to most substrate materials facilitate retaining the original...
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