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Graphene is a typical two-dimensional material which has fascinating electrical, mechanical, and optical properties. In particular, graphene-based smart MEMS/NEMS devices can automatically respond to external electric stimulation and convert to mechanical movement. Actuator is one of the most potential applications of graphene-based MEMS. However, its reliability investigation has rarely been reported...
In this paper, we developed an electrothermally driven RF MEMS capacitive switch, where the HfO2 film, deposited by atomic layer deposition (ALD) process, was used as insulation dielectric of the capacitor formed by the signal line and switching plate. Thanks high permittivity and excellent electrical and thermal isolation properties of the HfO2 film, as well as high driving force of the electrothermal...
This paper presents a digital mirror for tunable laser wavelength selection using microelectromechanical systems (MEMS) technology. The digital mirror which has discrete reflection spectrum is totally different compared to the current broadband mirrors MEMS tunable lasers . The reflection of the digital mirror can be tuned by digital pumping signals which promise fast output wavelength switching....
This paper reports a theoretical and experimental study of a MEMS injection-locked laser (ILL). The micromachined injection-locked laser consists of a MEMS tunable laser (master) and a Fabry-Perot multimode laser (slave) that is integrated by using deep RIE processes onto a single chip. Based on the experimental results, hysteresis property in asymmetrical tuning curve is observed and optical bistability...
This paper presents an optical logic NOR gate constructed by two MEMS tunable lasers and a Fabry-Perot (FP) laser chip. The key idea is that the FP chip is directly controlled by two tunable optical signals via the physical mechanism of injection locking. Compared with other fiber-based gating mechanisms, this logic operation only depends on the optical power without need for accurate phase matching...
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