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Thin film structures have found a wide variety of applications in electromechanical technologies. As the design flexibility for these structures increases, so does the demand for design software that can provide some good insights into the behavior of the structure before it is fabricated. In this study, a finite element code based on a combination of equivalent single-plate theory and classical laminated...
In this study, a finite element code based on a combination of equivalent single-plate theory and classical laminated plate theory was used to study the dynamic behavior of the thin film membrane structures. The structure studied was piezoelectric micromachined ultrasonic transducer (pMUT) fabricated with MEMS technology. The membrane has two different shapes, square and rectangular. Two different...
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