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An ellipsometric gas sensor based on the surface Plasmon resonance (SPR) effect of ~43nm thick gold layers was investigated. To protect the gold layer from contamination and to improve the detection limits, the gold layers were top-coated with 5–6nm thick layers of organic a-C:H or with inorganic metal oxides TiO 2 or ZrO 2 . The additional layers increased the long-term stability,...
MgF 2 and TiO 2 single layers and layer stacks were produced by a spin-coating sol-gel process. The final temperature treatment was carried out at 100°C. The layers were deposited onto silicon and fused silica substrates and were analysed by means of atomic force microscopy, X-ray photoelectron spectroscopy, transmission electron microscopy, ellipsometry, and UV–vis transmission spectroscopy...
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