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Nanomanipulation and nanoassembly using atom force microscopy (AFM) is a potential and promising technology for nanomanufacturing. Precise position of the tip of AFM is important to increase the accuracy and efficiency on fabricate complex nanostructures. However at the nano-scale, it is difficult to acquire the tip position expressed by the coordinate in real time due to PZT nonlinearity and thermal...
One of the prerequisite conditions for making a successful manipulation is that the relative position between the AFM tip and the objects can be sensed and controlled accurately. While this prerequisite is grandly hampered by the PZT nonlinearity and thermal drift. Although the PZT nonlinearity can be compensated to a certain extent through mounting a position sensor on the PZT scanner, this method...
AFM based nanomanipulation is still hindered by large spatial uncertainties encountered in tip positioning caused by PZT nonlinearity and thermal drift. In this paper, a landmark based positioning method is proposed to solve these problems. Its pivotal idea is that the tip position is described in a feature based landmark coordinate instead of length based Descartes coordinate. During manipulation,...
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