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In an effort to improve the situational awareness of maritime vehicles, flexible MEMS pressure sensor arrays are developed for underwater sensing applications. This paper outlines the development of piezoelectric microdiaphragm pressure sensor arrays that can perform a passive fish-like underwater sensing. Individual sensors have a low footprint of 1.8 × 1.8 mm2 and do not require any power for their...
The paper reports the fabrication, characterization, and experimental results of a piezoelectric MEMS pressure sensor array for underwater sensing applications. An array of five PZT sensors is developed that can perform passive fish-like underwater sensing. The array is capable of locating underwater objects by transducing the pressure variations generated by moving objects. Individual sensors have...
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