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Using microelectromechanical systems technology, the authors have developed the world's smallest, lightest and lowest electric power-consuming laser Doppler blood flow sensor that can measure blood flow while the subject is moving. The influence of alcohol consumption on blood flow was investigated when measuring at a subject's earlobe. An arm-raising test in which the subject lifts an arm with the...
The authors propose a new sensor structure for an integrated laser Doppler blood flowmeter that consists of two silicon cavities with a PD and laser diode inside each cavity. A silicon lid formed with a converging microlens completes the package. This structure, which was achieved using micromachining techniques, features reduced optical power loss in the sensor, resulting in its small size and significantly...
Using Micro Electro Mechanical Systems (MEMS) technologies, we have developed the world's smallest, lightest, and least power-consuming integrated laser Doppler blood flow sensor. Unlikely commercial optical fiber type blood flow instruments, the structure of our sensor need not optical fiber, which is also invulnerable to any movements of the person wearing it. Therefore our sensor enables stable...
This paper reports on the development of a new integrated laser Doppler blood flow microsensor and its application for monitoring the blood flow of chickens as an important factor in preventing avian influenza infection. To enable the attachment of the blood flow sensor to chickens without making the attachment felt, we have developed the world's smallest size (1/1000 the weight of a commercial blood...
We propose a new structure for the integrated laser Doppler blood flowmeter which consists of a Si cavity and a photodiode and a laser diode within the cavity. A silicon cover formed with a converging microlens also functions as the package. This structure has a reduced rate of optical power loss in the sensor, resulting in significantly low power consumption.
We demonstrate very high-density ferroelectric probe storage experiments of 1 Tbit/inch2 in polycrystalline Pb(Zr, Ti)O3 (PZT) thin film for the first time. Very thin polycrystalline PZT film with the thickness of 40 nm was successfully deposited on silicon substrate with SrRuO3 (SRO) electrode using liquid delivery metal-organic chemical vapor deposition (MOCVD) method. The PZT film has very homogeneous...
We demonstrate very high-density ferroelectric probe storage experiments of 1 Tbit/inch2 in polycrystalline Pb(Zr, Ti)O3 (PZT) thin film for the first time. Very thin polycrystalline PZT film with the thickness of 40 nm was successfully deposited on silicon substrate with SrRuO3 (SRO) electrode using liquid delivery metal-organic chemical vapor deposition (MOCVD) method. The PZT film has very homogeneous...
This paper reports on the development and evaluation of various multi-probes consisted of silicon cantilevers with different types of tips made of platinum, ruthenium, chromium and diamond for probe-based ultra-high-density ferroelectric data storages beyond 1 Tbit/inch . The metal probes can write and read the data bits on a medium with contact operation. We performed wear tests on the various tips...
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