The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
This paper describes a demonstration of power enhancement by nonlinear oscillation in a millimeter-sized electrostatic vibrational energy harvester for the future Internet of Things. To attain nonlinearity in the microelectromechanical-system (MEMS) device, a gold spring, which has a lower value of Young's modulus than conventional materials, is adopted as a component of the MEMS structure. The nonlinear...
This article describes the fabrication of a microelectromechanical system (MEMS) mirror array and mirror‐drive electrodes with high‐aspect‐ratio gold walls that reduce electrical interference in a wavelength‐selective switch (WSS). The MEMS mirror array, in which a lot of closely spaced adjacent mirrors are electrostatically operated, can be fabricated with a high yield by encapsulating the mirrors...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.