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In this work, the OTFTs with the nano-groove Al gate electrodes were fabricated by UV nano imprint technology. The flexible UV transparent ETFE mold was fabricated by the hot-embossing with the HSQ master mold. The nano-groove Al gate electrodes with the line/space about ∼95/355nm were fabricated successfully. The performance of OTFTs was improved and the proposed process will be suitable for the...
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