The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
In the present paper, a new approach is presented to model and control single wafer rapid thermal processing (RTP) systems. In the past decade, RTP has achieved acceptance as the mainstream technology for semiconductor manufacturing. Thermal processing is one of the most efficient ways to control the phase-structure properties. Moreover, the time duration of RTP systems reduces the so-called thermal budget...
In the present paper, a new approach is presented to model rapid thermal processing (RTP) systems. Within the past decade, RTP has achieved acceptance as the mainstream technology for semiconductor manufacturing. Thermal processing is one of the most efficient ways to control the phase-structure properties; moreover, the time duration of RTP systems reduces the so-called thermal budget significantly...
In the present paper, proper orthogonal decomposition (POD) method is employed to derive a lumped-parameter model for systems governed by two-dimensional (2- D) parabolic convection-diffusion (PCD) equation. The POD method employs singular value decomposition (SVD) to explore the content of a data set in order to identify the most and least variation to choose lower-order basis functions that provide...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.