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This work describes a new generation of instrumentation that aims to address the challenge of on-wafer measurement of nanodevices in the microwave regime. The system proposed is built up with a vector network analyzer, a scanning electron microscope and miniaturized ground-signal-ground probes fabricated using silicon-on-insulator technology with contact sizes of 2 µm2. Dedicated calibration standards...
A new generation of instrumentation is developed to address the challenge of on-wafer measurement of nanodevices in the microwave regime. The system proposed is built up with a vector network analyzer, a scanning electron microscope and home-made miniaturized ground-signal-ground (GSG) probes fabricated on silicon-on-insulator (SOI) technology and mounted on nano-positionners. A first generation of...
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