This paper reports an alternative simple fabrication process for twin gate junctionless Vertical Slit Field Effect Transistors. N-type devices have been successfully manufactured on SOI substrates with a doping density 5×1018 atoms/cm3. The devices demonstrate up to six decades of Ion/Ioff ratio and a sub-threshold swing of 90 mV/decade relative to a slit width of approximately 10 nm.
This paper proposes a CMOS based process for Vertical Slit Field Effect Transistors. The central part of the device, namely, the vertical slit, is defined by using electron beam lithography and silicon dry etching. In order to verify the validity and the reproducibility of the process, devices having the slit width ranging from 16 nm to 400 nm were fabricated, with slit conductance in the range 0...
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