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Silicon interposer based 2.5D IC can realize heterogeneous integration and is effective to implement an electro-optical system. In this paper, we analyze the CPW structure transmission line on silicon interposer for high speed electro-optical system. The RDL-TSV-RDL transmission structure is used to reduce the resonance. An optimization method is proposed to improve the performance of the RDL-TSV-RDL...