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This study implements a system for determining the precise location of a moving wafer in a process chamber. An array of optical sensors positioned along an axis transverse to the path of a moving wafer is employed in this wafer positioning system. A computer program for wafer center calculation is developed based on the time dependent signals from the optical sensing module. The developed computer...
A laser scanning method for wafer positioning is proposed. This wafer positioning method incorporates a laser scanner system and a scattering light receiving system. The scanner is used to reflect a laser beam into a scanning line on the sensing area. As the wafer passes by the scanning line, a scattering light receiving system detects the time-sequence signal of the scattered lights. The position...
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