Silicon and silicon nitride metal-coated cantilevers have been in use for a long time in several scanning probe microscopy applications that require electrically conductive probes. However, conventional metalized cantilevers present several drawbacks such as limited life-time of the metal layer due to wear, and increased tip radius. This work focuses on monolithic metallic cantilevers developed in...
An optimization of initial gap of a movable electrode in elementary cell of planar electrostatic comb drive utilized transverse displacement is considered and analyzed. An analytical equation providing the maximal value of relation between sensitivity and area of the elementary cell is obtained in one-dimensional case.
Electromagnetic pulse metal processing techniques (EPMPT) such as welding, forming and cutting have proven to be an effective solution to specific manufacturing problems. A high pulse magnetic field coil is a critical part of these technologies and its design is a challenging task. This paper describes a Bitter coil design using a newly developed methodology for a simplified analytical calculation...
The MEMS designing is a very challenging and interdisciplinary task. The paper deals with advanced computational methodology required to extend the considered effects within the ordinary FE-analyses taking into account parameter variation at the physic and system levels.
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