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Miniaturized electrolyte–insulator–semiconductor capacitors (EISCAPs) with ultrathin gate insulators have been studied in terms of their pH‐sensitive sensor characteristics: three different EISCAP systems consisting of Al–p‐Si–Ta2O5(5 nm), Al–p‐Si–Si3N4(1 or 2 nm)–Ta2O5 (5 nm), and Al–p‐Si–SiO2(3.6 nm)–Ta2O5(5 nm) layer structures are characterized in buffer solution with different pH values by means...
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