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The planar microtoroid with unique whispering gallery mode (WGM) has ultra-high Q value (UHQ) and better optical property. In order to get the UHQ cavity, it is very important to deal with the surface of microtoroid using CO2 laser reflow during the fabrication process. Because of the TEM00 laser output, there will be thermal stress which affects the Q value badly. In this paper, we design physical...
Based on the typical microcavity quantum property and integration of the planar microtoroid with ultra-high Q value(about 108), this paper theoretically proposes the design of the micro-optical voltage sensor. The voltage sensor belongs to the field of MOEMS, the entire device is composed of one microtoroid (diameter from 60 mum to 120 mum) with the ohmic contact in the middle and a fiber taper waveguide...
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