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In this paper, a sliding mode control with perturbation estimation (SMCPE) using an extended Kalman filter (EKF) is proposed for the motion tracking control of a micropositioning system with piezoelectric actuation. Based on the solely measurable position information, the EKF on-line estimates not only the velocity but also the hysteresis term, which are used by the SMCPE for real-time control. The...
In this paper, a two-loop controller is proposed to suppress the hysteresis and to achieve a precise motion tracking control for a piezo-driven XY parallel micropositioning system. Specifically, an inner-loop disturbance observer (DOB) is employed to tolerate the unmodeled hysteresis which is treated as a disturbance to the nominal plant model of the system, and an outer-loop feedback controller is...
In this paper, a model reference adaptive controller (MRAC) is designed for a piezo-driven XY parallel micropositioning stage to compensate for the hysteresis effects aiming at a sub-micron accuracy motion tracking control. To convert the desired motion trajectory into voltage input, the inverse modified Prandtl-Ishlinskii (PI) hysteresis model is employed. The modified PI model is identified by optimizing...
In this paper, a global sliding mode control (GSMC) scheme is implemented on a piezo-driven XY parallel micropositioning stage to compensate for the unmodeled hysteresis aiming at a sub-micron accuracy motion tracking control. The GSMC controller is designed with the consideration of all uncertainty bounds. In the controller implementation, a high-gain velocity observer is adopted to estimate the...
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