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Silicon film and Metal/Si multilayer films of three different metals, Ti, Al and Zn, were prepared via magnetron sputtering. The electrochemical performance of these films was investigated, with a focus on the Li + intercalation behaviour, using Auger electron spectroscopy and in-situ electrochemical dilatometry. Comparative studies of silicon film electrodes and Metal/Si multilayer film electrodes...
Different LiCoO 2 thin films are prepared with radio-frequency (RF) sputtering technique. The physical and electrochemical properties of the films are characterized with X-ray diffraction (XRD), Raman scattering spectroscopy (RS), scanning electron microscopy (SEM), energy dispersive spectroscopy (EDS) and charge–discharge experiments. The films obtained at high sputtering power such as 150W...
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