The formation of strained layers and a non-monotonic evolution of strain in high energy (100MeV) silver ion (Ag 7+ ) irradiated undoped semi-insulating GaAs are observed and analyzed using Raman scattering and high resolution X-ray diffraction (HRXRD) measurements. At low fluence, compressively strained layers are formed, whereas, with increase in fluence both compressive and tensile strains...
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