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We present a MEMS torsional resonance magnetometer based on Lorentz force, which consists of torsional structures, torsional beams, metal plates, a coil, and a glass substrate. The Lorentz force, introduced by the interaction of a current in the MEMS coil and an external horizontal magnetic field, leading to the displacement of the torsional structure, which can be detected by two sensing capacitors...
We report design, fabrication and characterization of a MEMS-based tunable flexible photonic crystal, which is comprised of a periodic array of 290 nm diameter high-index (3.46) silicon rod embedded in a low-index (1.56) SU-8. A couple of chevron electro-thermal actuators are attached to the flexible photonic crystal and tunability is achieved by mechanical force generated by the actuators. The mechanical...
The operating principle of the RF MEMS phase shifter is described. Two improved design approaches based on the CPW discontinuities to decrease the return loss are proposed. By using network theory and CST microwave studio simulation tool, the proposed RF MEMS phase shifters are modeled. Simulation results for the two designs are compared and discussed based on the analysis. Simulation results show...
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