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In this paper, we present novel micro-electro-mechanical systems (MEMS) devices for unique probe recording technology, where the 1-D cantilever probe array approach requires a small number of cantilever probe tips for a large media platform and hence has higher reliability. The probe storage system is composed of three key MEMS devices: MEMS XY-stage, linear motor and 1-D cantilever probe array with...
AbstractThe fabrication of X-ray masks is a critical and challenging process in LIGA technique. As inductively coupled plasma (ICP) deepetching appears to be the most suitable source for deep silicon etching, we fabricated a new type X-ray mask using this technique. In comparison with other types of X-ray masks, the mask we fabricated has the advantages of its low cost and its simple fabrication process...
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