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This paper describes a metric that measures the quality of defect inspection recipes. It takes into account several factors including nonvisual rate, defect of interest rate, defect count per wafer, and inspection time. The calculation runs automatically, and only minimal user input is necessary. Different weighting models allow giving each factor more or less importance, thus making the metric flexible...
This article describes a metric that measures the quality of defect inspection recipes. It takes into account several factors including non visual (NV) rate, defect of interest (DOI) rate, defect count per wafer, and inspection time. The calculation runs automatically and only minimal user input is necessary. Different weighting models allow giving each factor more or less importance, thus making...
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