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This paper presents an automated handling approach of two-dimensional nanomaterials using a robotic setup inside a high-resolution scanning electron microscope. Applying image processing of the visual feedback provided by the electron microscope, a fully automated sequence is developed to align a robotic driven force sensor with sub micrometer accuracy and to conduct nanoindentation measurements on...
In this paper, the magnetoresistance behaviors of undoped and N-doped graphene were investigated in different external magnetic fields. After synthesized by chemical vapor deposition (CVD) method at ambient pressure, the graphene films were transferred to silicon/silicon dioxide substrates and deposited two Al pads to improve the ohmic contact. Magneto-resistance measurements show that both resistances...
With the developed process, four MEMS tensile testing chips of <;110>;-oriented single crystal silicon (SCS) nanobeams were achieved in one SOI wafer with thickness from 45 to 100 nm. Mounting the chips onto a custom made TEM sample holder, which integrated also comb drives and force sensor beam, in-situ TEM tensile tests were carried out. The measured Young's modulus (from 74 Gpa to...
In-situ tensile testing in EM (electron microscopy) is a useful tool for studying mechanical properties of nano-structures because it can provide quantitative information on sample deformation at atomic scale. In this work, MEMS tensile-testing chips with differently thick <110>-oriented SCS nanobeams were designed, fabricated and utilized in SEM and/or TEM to manipulate SCS nanobeam and measure...
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