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Piezoelectric shear strain was measured for c-axis oriented epitaxial Pb(Zr,Ti)O3 (PZT) thin films. The PZT films, with a composition near the morphotropic phase boundary (MPB), were epitaxially grown on (001)MgO substrates and then microfabricated into a rectangular shape. Lateral electrodes were deposited on both sides of the PZT films to apply an external electric field perpendicular to the polarization...
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