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Absorption bands near 155nm due to electronic transitions of CH 3 OH, CH 3 OD, CD 3 OH and CD 3 OD in a liquid phase were observed by using a uniquely designed attenuated total reflectance–far ultraviolet (ATR–FUV) spectrometer. Their transmittance spectra were also measured for the absorption tail region of 190–220nm. Isotope effects were found in the peak maxima and...
Far-ultraviolet (FUV) spectroscopy combined with attenuated total reflection (ATR) is employed for direct measurement of the concentrations of semiconductor wafer cleaning fluids such as SC-1 and SC-2. FUV absorption spectra of these aqueous solutions in the 170 – 200 nm region are highly sensitive to changes in both hydrogen bonding and hydration. We adopt quartz as an internal reflection element...
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