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We deposited hydroxyapatite (HAp) thin films on Si(100) substrates by means of electron cyclotron resonance (ECR) plasma sputtering from a HAp target and characterized their structural properties by X-ray diffraction (XRD) and Fourier transform infrared absorption spectroscopy. Deposition in the presence of an H 2 O vapor at room temperature incorporated H 2 O and OH species in the...
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