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The evolution of surface morphology during the growth of N-polar (0001¯) GaN under N-rich conditions is studied by kinetic Monte Carlo (kMC) simulations for two substrates miscuts 2° and 4°. The results are compared with experimentally observed surface morphologies of (0001¯) GaN layers grown by plasma-assisted molecular beam epitaxy. The proposed kMC two-component model of GaN(0001¯) surface where...
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